SMIC, the largest foundry in China, is test-driving one of China’s first domestic immersion DUV lithography tools, reports data-analytics-id=”inline-link” href=”https://www.ft.com/content/8fd79522-e34f-4633-bc87-ef0aae2d9159″ data-url=”https://www.ft.com/content/8fd79522-e34f-4633-bc87-ef0aae2d9159″ target=”_blank” referrerpolicy=”no-referrer-when-downgrade” data-hl-processed=”none”>Financial Times. The system was developed by Shanghai Yuliangsheng Technology Co., which is linked to Huawei’s data-analytics-id=”inline-link” href=”https://www.tomshardware.com/tech-industry/chinas-sicarrier-challenges-u-s-and-eu-with-full-spectrum-of-chipmaking-equipment-huawei-linked-firm-makes-an-impressive-debut” data-before-rewrite-localise=”https://www.tomshardware.com/tech-industry/chinas-sicarrier-challenges-u-s-and-eu-with-full-spectrum-of-chipmaking-equipment-huawei-linked-firm-makes-an-impressive-debut”>SiCarrier, and is believed to be a significant part of China’s effort to become self-sufficient in wafer fab equipment.
SMIC’s test platform from Yuliangsheng involves a DUV machine that uses immersion lithography and is reportedly designed for 28nm-class fabrication…
